If the ultrasonic was effective at removing the contamination, then Megasonics will likely work and be much less likely to damage the combs. They are also effective at cleaning down into recessed areas, trenches, etc. Expect to pay considerably more than you would for an ultrasonic due to more sophisticated electronics and manufacturing methods but there are tabletop models that are reasonably priced. Mark West Imtec Acculine - Celebrating 40 years of quality products and innovation. p: 510.770.1800 ext.112 e: mwest@imtecacculine.com w: www.imtecacculine.com See us on Youtube The content of this message including attachments is Imtec Acculine, LLC Confidential. If you are not the intended recipient and have received this message in error, any use or distribution is prohibited. Please notify me by reply e-mail and delete this message from your computer system. Thank You. -----Original Message----- From: ProtoSi Info [mailto:info@protosi.com] Sent: Tuesday, July 24, 2012 12:22 PM To: mems-talk@memsnet.org Subject: [mems-talk] dicing particle contamination Hello We've been struggling with particles getting embedded in our delicate silicon comb structures during dicing. Our current process involves spraying on a 10um thick layer of photoresist over the entire wafer and then do a soft bake. After dicing we rinse the wafer to remove particles before stripping off the resist. However we're still getting particles stuck in-between the comb fingers. We've attempted ultrasonic cleaning but that damages the combs. Any tips to remove or prevent particles would be greatly appreciated. Thank you Kevin Chang ProtoSi _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk