durusmail: mems-talk: design file for Guckel rings?
design file for Guckel rings?
2012-09-03
Albert Henning
design file for Guckel rings?
Albert Henning
2012-09-03
I am looking for design files (GDSII, DXF, or similar) for standard
Guckel rings (to bracket stress/stress gradient in thin films).  I'm
also looking for design files for related stress-characterization
structures (e.g. cantilevers), similar to those developed by Bill Sharpe
and his colleagues.  Or, if NIST or a similar organization has a
publicly-available die- or wafer-level design file with a complete set
of stress-related metrology structures, of course getting the URL to
that resource would be terrific.



Thanks in advance.



Al Henning



------------

Albert K. Henning, PhD

Director of MEMS Technology

NanoINK, Inc.

215 E. Hacienda Avenue

Campbell, CA  95008

408-379-9069

ahenning@NanoINK.net

http://www.NanoINK.net





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