Hello, I have an electrode structure with 3 metals - gold, Ti and Pd. On top of each metal I have a layer of SiN insulator. When I clean these structures electrochemically using Sulfuric acid with maximum voltage around 1.5 mV, some areas of SiN on gold metal seems to delaminate or cracks appear. Does anyone know what might be happening during electro-chemical cleaning? Thanks Sheela _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk