durusmail: mems-talk: SU-8 2025 on AZ 4620 Sacrificial Layer
 
SU-8 2025 on AZ 4620 Sacrificial Layer
2013-02-18
SU-8 2025 on AZ 4620 Sacrificial Layer
André Bödecker
2013-02-22
We achieved the best results with electroplated copper as a sacrificial
layer because of the high selectivity to all solvents.



regards



André Bödecker





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