durusmail: mems-talk: Multi layer su8 soft bake temperature
Multi layer su8 soft bake temperature
Multi layer su8 soft bake temperature
André Bödecker
2013-03-14
Hello,



yes, both should be done with the same parameters. Only the final curing
step should be done in one single step at the end.



Best regards,

Mit freundlichem Gruß



André Bödecker



Institut für Mikrosensoren, -aktoren und -systeme

Universität Bremen Fachbereich 1

Otto-Hahn-Allee1

28359 Bremen

Tel: 0421 218 62596



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