Dear all,



Hi, I want to do a cost analysis of my MEMS device using a foundry service.
Since I fairly new to this field, I am not familiar with the how much it
would charge for some processes.



So I am wondering if anyone can give me a price estimate on the following
processes (per 4 inch wafer, or any other charging standard)?



1.       Back side anisotropic etching

2.       Thermal evaporation

3.       Photolithography

4.       Polyimide substrate deposition and pattern

5.       XeF2 release



Thanks very much

Best Regards

Yuan Jia

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