Benchmark Technologies has a lot of experience in masks for testing litho

Verstuurd vanaf mijn iPad

> Op 15 okt. 2013 om 18:30 heeft "SHANE GUO"  het
volgende geschreven:
>
> Hi all,
> I am working with SU-8 molds for making microfluidic devices through
softlithography process. I am supposed to test our fabrication capability,
lithography resolution and spin coating uniformity. I need to design a mask
including features that can help me to find out the above things.
> Do you guys know where I can find such mask patterns or references for
designing such patterns?
> Thank you in advance for your help.
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