Hi Girija, Try this: Google:" mit cantilever si3n4 lab". Open first 4 links. 4 .pdf docs will be downloaded. These docs include a detailed info about microcantilever fabrication. Best, Ajy On 24 Oct 2013 18:23, "girija moona"wrote: > hello everyone, > I plan to fabricate Sio2 or Si3N4 microcantilevers for low force sensing. > looking forward for help in this regard. I would need all the fabrictaion > steps in detail. If anyone could help, as i am new in this area. > Thanks > > Regards > Girija > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk