durusmail: mems-talk: NIL system
NIL system
NIL system
Judith Linacero Blanco
2014-02-04
Hi at all,


How do you do to replicate a nanolithography silicon master in some
polymeric materials such as PMMA with NIL? You don't use CVD to
deposite silano monolayer? and if not; you don't have sticking
problems between replica and master? "

Best regards,
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