Hi, Copper does not oxidize in such a short time. But I would suggest that after resist patterning do a 2 mins (H2SO4 :DI in 1:10)+N2 dry and then electroplate Nickel. Ricky -----Original Message----- From: mems-talk-bounces+ricky.anthony=tyndall.ie@memsnet.org [mailto:mems-talk- bounces+ricky.anthony=tyndall.ie@memsnet.org] On Behalf Of ??? Sent: 05 March 2014 09:06 To: General MEMS discussion Subject: [mems-talk] natural oxidation of copper thin film Hi. at first, I want you to understand that I don't know english very well. I performed Cu deposition process(3000β«) for forming electrode(for electroplating) and I wil perform PR patterning on Cu layer and Ni electroplating. I would like to know if Cu film can oxidize naturally after 1~2 days. if Cu film oxidizes, it affects Ni electroplating?? ex) oxidized Cu layer can I no longer use for electrode for electroplating??? _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk