durusmail: mems-talk: Selective etching of aluminum oxide and titanium
Selective etching of aluminum oxide and titanium
2014-04-29
2014-05-01
Selective etching of aluminum oxide and titanium
Xiaoning Wang
2014-04-29
Hello,

I'm trying to find a way to etch aluminum oxide without attacking titanium.
Several common Al2O3 etchant I tried all etch Ti quite fast as well, such
as NaOH, H3PO4, NH4OH, etc. Can anyone suggest a way to achieve selective
etching between these two?

Any advice will be greatly appreciated! Thank you very much!

--
Travis
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