Dear TK:
  I'd like to bring to your attention that we offer DRIE service with our new
STS ICP deep silicon etcher.  Please let me know if we
can be of any service to you.

Sincerely,
Chia-Lun Tsai, Ph.D.
   Research Scientist
   Integrated Sensing Systems, Inc.
   387 Airport Industrial Dr.
   Ypsilanti, MI 48198
   Phone: (734) 547-9896, Ext.115
   Fax: (734) 547-9964
   Email: chialun@mems-issys.com
   http://www.mems-issys.com/

-----Original Message-----
From: TK Wang 
To: MEMS@ISI.EDU 
Date: Monday, June 28, 1999 1:55 AM
Subject: Deep RIE


>Can someone tell me typical etch rate, aspect ratio
>of deep RIE of silicon?
>Any commercial facilities that can do DRIE?
>
>How would I estimate the cost of a DRIE process?
>I need a 25um deep etch from one side, then a
>through etch from the other.   Wafer is 4 inch,
>about 300um thick.
>
>TK Wang
>
>
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