Dear distinguished members of mems-talk, I am trying to microfabricate micro grooves which are 200um x200um lines and spaces in term of lithography mask. I am using STS ICP615 - RIE machine, and a Bosch process with SF6 and O2 for Si etch, and C4F8 for surface polymerization. I tried many recipes, and finally found a suitable one. Recently, I realized that the determined recipe is no longer working. From tool log files I found out that, for some reason the reflected platen power is larger compared to previous recipe runs. The platen power that is used in the processes, was 13W in 13.56MHz platen. In earlier processes, the reflected power was almost 0 W. However, right now, reflected platen power is measured as 7-8 W. I tried to clean the chamber with O2 for 30min hoping that cleaning the chamber may help with reducing the reflected platen power. I applied the same recipe and found that the resultant reflected power is still around 7-8 W. Soon, I will try longer O2 cleaning time. But I am not sure if that will solve my problem. If you faced this problem before and know what would solve the problem, or if you have an idea on how to solve it, could you please share your knowledge as soon as possible? Thanks in advance, Regards Serdar Taze, Student, M.Sc Bilkent University Mechanical Engineering Program Bilkent Üniversitesi, 06800 Bilkent, Ankara, Turkey E-mail: serdar.taze@bilkent.edu.tr, s-taze@hotmail.com _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk