durusmail: mems-talk: Connecting tubes to silicon chips
Connecting tubes to silicon chips
2015-08-12
Connecting tubes to silicon chips
Leily Majidi
2015-08-12
Hi everyone.

For my project, I want to fabricate chips containing microchannels on
silicon wafer. I want to etch the inlet/outlet holes from the backside of
the wafer. Since the holes are going to be very thin ones, could give me
some ideas on the tubing or connectors that you probably used before for
the same purpose?

I'd appreciate any help.
Thank you
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