durusmail: mems-talk: How to avoid pin holes on SU8 2075
How to avoid pin holes on SU8 2075
2015-10-19
KarthiKeyan K (2 parts)
2015-10-20
Andrew Sarangan (2 parts)
2015-10-20
How to avoid pin holes on SU8 2075
KarthiKeyan K
2015-10-19
Dear Friends,

Please suggest how to avoid pin holes on SU8 2075 photoresist layer during
Pre & Post baking process at 65C & 95C temperature (temperature has
followed as per the data sheet instructions).

There is no pi holes and air bubbles during spin process but i can see 1 or
2 pin holes under the size is 300-500 microns so please give me the
suggestion for the same.

--

Thanks & Best Regards,
*KarthiKeyan K*
Mobile No: +91-9944477213
Email ID: karthimems@gmail.com 

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