durusmail: mems-talk: Silicone-plastic bonding
Silicone-plastic bonding
2016-02-18
Silicone-plastic bonding
Leily Majidi
2016-02-18
Hello all,

I am having problem bonding silicone chip which is coated with chromium to
Lexan ploycarbonat cover. The bonding seems good, however I have leakage in
my device at the edges.
I have microchannels on my chip and I need to have a flow through
microchannels. I used SU8-2 with the thickness around 5 um. After spin
coating, I baked two parts and then used UV and finally post bake.

I appreciate it if you share your knowledge with me.
Thanks!
Leily
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