Dear mems-talk community, Has anyone tried doing ion implantation on suspended silicon membrane (thickness of 500 nm). The membrane is vacuum sealed. I’m afraid ion implantation might incur too much damage or stress on the membrane to shatter/break, but I don’t have any other ways to dope it for now… Any guidance on this matter would be greatly appreciated. Thank you! -Jenny _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk