Dear all:

We are looking for spin wet etcher for process uniformity in MEMs devices.
Preferrably the spin wet etcher can handle diluted HF. It should also be
able to heat the acids to certain temperature and maintain the condition. I
knew an Austria company called SEZ offering very nice and sophisticated wet
etching equipment. But their products are too expensive. I appreciate if
anyone knows any other companies.

P.D. Wang
CoreTek, Inc.