Hello MEMS.
I want to know about SAL resolution. And Condition.
I use it for  E-beam resist .
But my pattern is removed when I doveloped  it.
What is problem?
Anyone who know the answer reply to me.
Thank you for reading my mail.
My e- mail address is
                iampcm@hanmail.net   or   iampcm@kuccnx.korea.ac.kr
Sincerely yours.