I have a box of 6" SOI wafers (epi 0.2 um, oxide 0.36 um) to make some capacitive driven resonators with 1um mechanical features with no electronics. To get this done fast, should I get someone to implant it for me or should I order some spin on glass and do the work myself? and does anybody know a good ion implant service in Florida? Any relevant information regarding SOI doping would be appreciated. Thanks! Joe