hello everybody,
  here is a compilation of responses that i got for dry etching techniques
for etching a 50 angstrom Cr layer.
Thanks to all who responded
Siddharth



>
>Just put your samples into an oven and heat it up (couple of hundreds of
>degrees) in an atmospheric or oxygen ambient. The resulting chromium
>oxide is unstable. I used a standard plasma asher to remove several
>hundreds of angstroms (half a hour at 1000 W and moderate oxygen flow).
>
>________________________________________________________________________
>_
>Matthias Heschel
>Microelectronics Center
>Technical University of Denmark, Bldg. 345 east
>DK-2800 Lyngby
>