We have developed a labview application that takes the data from a Ocean Optics Reflection Spectrometer and calculates the thickness of tranparent films (in real time). In older fabs, this instrument is called a Nanospec. We use it to do routine measurements of the thickness of SiO2, SiN, and photoresist layers. With a bit of fiddling, it can be used to measure the thickness of Si membranes. We are making the labview software available to whoever wants it. The only proviso are that any use of the software fit the standard Freeware policies (i.e. giving credit, using the software for commerical purposes, etc). This software does not come with the ocean optics drivers. It is only the part we wrote ourselves If you are interested, send me an e-mail and we will send the code to you. Ken Westra MicroFab at the University of Alberta www.ualberta.ca/~microfab PS The software was written by Michael Colgan. A Co-op engineering student at the MicroFab