Dear MEMS Researchers,

I'm looking for etchant(If possible, wet) of Ru(Ruthenium).

I tried etching Ru with an etchant,
but it didn't work well because of etching residue(thin film).
I don't know what it was.

The etchant -> (K3[Fe(CN)6] $B!' (BNaOH $B!' (BH2O $B!a (B500:50:1000(wt%),60
degree C)

I hope to get your suggestions.

Thank you.

Koji SANO

 $B#O#M#R#O#N (B Corporation

Phone:+81-298-64-4106
Fax  :+81-298-64-3380
E-mail:sano@ant.trc.omron.co.jp