Hello, i intend to do contact lithography on a BCB-film (a polymer film) which is spun on a rectangular glass sample. For the given application i need resolution which is as high as possible. Unfortunately the resolution is still unsatifactory. I believe that it is caused by the edge bead of the BCB-film and the photoresist. I try to remove the photoresist edge bead by exposing and developing the edge, using a simple shadow mask. That works fine when doing lithography on glass only. I try to remove the bcb edge by etching it, using RIE. I can't measure any remaining edge bead. Nevertheless the resolution of lithography on BCB films is much worse than that on glass alone. Thank you for any comments, > > Jan Sundermeyer > > >