hello,
I.m process eng'r of HD semicon ( new name of LG semicon ).

I appreciate if you can help me the following item.

1.How's the condition of the component which make SiH3N4 when
  R.I ( Reflexive Index ) varied ?
  1) film hardness
  2) element structure
  3) film stress
  4) adhesion with other film

sincerely yours.