I wanted to etch a film of sputtered Ni-Fe. I tried H2SO4:H2O:H2O2
(1:10:1) to etch it. It didn't do anything. I then tried HCl. Nothing
again.

I was thinking of trying Phosphoric acid to etch it but I wanted to ask
anyone else that may have sputtered Ni-Fe if there was a specific
acid/chemical that had to be used. If nothing else, is there a handbook
that I could look at to find different etchants that I could experiment
with?

Thank you in advance,

Ranjan