durusmail: mems-talk: SU-8 10 Protocol problems
SU-8 10 Protocol problems
1999-08-24
SU-8 10 Protocol problems
Kelvin Liu
1999-08-24
Hi,
        I'm working with SU-8 10 and am having some adhesion and
developing problems. We are trying to obtain 30 micron deep features, but
when developing, the features either tend to all come off the slide or not
develop fully down to the glass. It seems like exposure time is not a
problem as adhesion of the SU-8 to the glass slide is. We are playing
around with baking methods and times. Does anyone have any advice about
baking such as hot plate vs. oven, temp and time, and prebaking the glass
slides to dehydrate them. Any help would be greatly appreciated. Thanks

Kelvin Liu


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