Dear MEMS community, Does anyone know the stress of heavily Boron-doped singlecrystal silicon lays and epitaxial singlecrystal silicon layer used for etch-stop. Is there any method to reduce the stress? Thanks very much. Regards Junhua Zhu _____________________________________________________ Junhua Zhu MEME Research Group Department of Precision Instruments Tsinghua Univ. Beijing P.R. China 100084