Hi,
        I use 2% of PMMA solution and toluene as the solvent.  Spin
coating twice at 3000 rpm. I got roughly 100 nm thick of PMMA film.


Huatang Chen
Graduate sutdent
Dept. of Materials Science and Mechanics
Michigan State University
East Lansing, MI 48824

On Thu, 26 Aug 1999, TLC wrote:

> Hello, I saw your posting about PMMA.   Which mixture and spin do you
> use to obtain 0.1um thick  resist?
> Kojo Linder
>
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