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Greetings.
Hope everyone is having a nice weekend.

Attached is the picture of a break in poly-Si lines that I came across.  The
poly-Si is deposited on silicon dioxide, implanted (to a partial depth) and
annealed.  The underlying substrate is a silicon wafer with trenches that
are filled with silicon dioxide.

Looking at the breaks, the initial speculation was that the stress in the
implanted and unimplanted poly-Si due to differences in TCE was causing the
poly to break.  But interestingly the "tapered" break pattern seems to be
consistent across several samples.  Has anyone seen a similar case before?
Any insights would help.

Thanks and with best regards,
Jaideep



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