A workshop on MEMS curriculum and curriculum development was held at the U. of Illinois - Chicago this past August (organized by Peter Hesketh). Included in that workshop were reports on a number of undergraduate curriculum efforts. References to our work at Dartmouth (including WWW sites) is given below. To my knowledge (and forgive me if I leave anyone out; the order follows more or less the order from the workshop), information on *undergraduate* programs at other institutions can be obtained from the individuals or references below. I'm certain there are WWW sites for most of these efforts, but do not have the URLs right at hand. Regards, Al Henning Associate Professor Thayer School of Engineering Dartmouth College al.henning@dartmouth.edu MIT (M. Lu and M. Schmidt, Microsystems Technology Lab); reported in M. Lu and M. A. Schmidt, "A process design course utilizing micromechanical devices." Proc. Ninth Univ./Gov't./Industry Microelectronics Symp., p.60-3 (1991). Published by IEEE. U. of Minnesota (NSF Grant ENG-9212159, W. P. Robbins, PI) U. Illinois-Chicago (NSF Grant ENG-9315420, G. Maclay, PI). Louisiana Tech, Institute for Micromanufacturing (C. Friedrich, NSF Grant EEC-9420600) Louisiana State U. (M. C. Murphy) U. Utah (R. Huber) Texas Christian U. (E. Kolesar) U. Pennsylvania (J. Zemel) Northeastern U. (P. Zavracky) Simon Fraser U. (A. Parameswaran) U. Illinois-Urbana-Champaign (T. A. DeTemple and M. Shannon) Dartmouth (NSF Grant DUE-9354726, A. K. Henning, PI); reported in A. K. Henning and C. G. Levey, "The Science and Technology of Micro-machines: Development of an Undergraduate Course." Proc. Eleventh Univ./Gov't./Industry Microelectronics Symp., p.230-236 (1995). Published by IEEE. See the following WWW URLs: http:// hypatia.dartmouth.edu/henning/henning.html http://hypatia.dartmouth.edu/ levey.html http://hypatia.dartmouth.edu/levey/ssml/home.html http:// hypatia.dartmouth.edu/henning/courses/es65/es65.html Some related references on undergraduate *microelectronics* fabrication include: +++R. J. Feugate, Jr., "A joint partnership for improving undergraduate microelectronics instruction". IEEE/SEMI Int'l. Semiconductor Manufacturing Science Symp., p.82-5 (1993) +++P. S. Gwozdz, "Semiconductor manufacturing education at San Jose State University". IEEE Trans. Semic. Manuf. 5, p.153-6 (1992) +++K. Prasad, "Enhancement of competence in microelectronics technology through incorporation of VLSI design and fabrication courses in engineering curriculum". Proc. Eighth Univ./Gov't./Industry Microelectronics Symp., p.137-40 (1989) +++R. L. Lane, et al., "Polysilicon gate NMOS project for undergraduate laboratory". Proc. Eighth Univ./Gov't./Industry Microelectronics Symp., p.132-6 (1989). +++A. K. Henning and C. G. Levey, "Undergraduate research in micro-fabrication science and technology at Dartmouth College". ASEE 1994 Annual Conf. Proc., pp. 2599-2606 (American Society for Engineering Education, Washington, DC, 1994).