We're doing some silicon micromachining with 5% TMAH at 80 degrees C. The sloping silicon sidewalls of the micromachined vias are somewhat nonuniform, not nearly as perfect as with KOH. Is this a characteristic of TMAH or are there parameters that can be tweeked to overcome this problem? Thanks, Kevin -- Dr. Kevin M. Walsh Electrical Engineering Department, Speed Scientific School University of Louisville, Louisville, KY 40292 (502) 852-0826 Internet address: kmwals01@starbase.spd.louisville.edu