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Dear colleagues,

We want to reestablish the MEMS assembly line of our lab and need to buy =
several new equipments such as sputtering coater, LPCVD for poly-Si and =
SiN, LTO or PECVD. Any information about the type, characteristics,and =
vender of these equipments is welcome, and the more detailed the better.

Thanks in advance!

Liuqiang Zhang

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Dear colleagues,
 
We want to reestablish the MEMS =
assembly line of=20
our lab and need to buy several new equipments such as sputtering =
coater, LPCVD=20
for poly-Si and SiN, LTO or PECVD. Any information about the type,=20
characteristics,and vender of these equipments is welcome, and the more =
detailed=20
the better.
 
Thanks in advance!
 
Liuqiang =
Zhang

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