durusmail: mems-talk: Quartz Etching
Quartz Etching
1999-09-28
1999-12-07
Quartz Etching
Weijie Wang
1999-09-28
Hello,

I am going to etch 10 micron depth grooves on quartz wafer. What's kind of
etchant I have to use and what's kind of mask I have to use when etching
is processing?

Thank you in advance.

Weijie Wang
Simon Fraser University
wwangc@sfu.ca


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