Hellow, for the etching quartz, you can do it by the solution of BHF. the mask ; Cr 150 A and Au 2000 A layer and Cr/Gold can be patterned for mask. Etching in BHF (80 C degree in temp.) You can try it. Good luck to you. May the grace of our Lord be with you. Best regards. Weijie Wang wrote: > Hello, > > I am going to etch 10 micron depth grooves on quartz wafer. What's kind of > etchant I have to use and what's kind of mask I have to use when etching > is processing? > > Thank you in advance. > > Weijie Wang > Simon Fraser University > wwangc@sfu.ca -- ========================================== Beomjoon KIM, Dr. Eng. MESA+ Research Institute, University of Twente NanoLink, Dept. of Electrical Eng. P.O. Box 217, 7500AE, Enschede, The Netherlands Phone:+31-53-489-4420 Fax:+31-53-489-2575 or 3343 E-mail; b.j.kim@el.utwente.nl (or) bjoonkim@ieee.org Http://www.el.utwente.nl/mesa ============================================ Home;Calslaan 49-11,NL-7522MJ,Enschede,The Netherlands tel: +31-53-489-4955 ============================================