durusmail: mems-talk: sacrificial layer
sacrificial layer
1999-11-05
sacrificial layer
Jerome Hauden
1999-11-05
Hi everybody,

I'm trying to find a way to make a suspended shelding gold plate over thick
air bridges (20µm).There is already silica, gold, and cromium on the
substrate. Does anyone knows a process to do that? I was thinking to
Photoresist but I'm afraid to remove both the PR and the gold layer.

Many Thanks.
Jerome
.....................................................
Dr. Jerome HAUDEN, Professor Assiocate
Laboratoire d'Optique PM Duffieux
UMR CNRS 6603 - Universite de Franche Comte
16 Route de Gray - 25030 Besancon cedex - France

tel: (33) 381 66 64 24 / fax: (33) 381 66 64 23
http://imfc.univ-fcomte.fr/lopmd/
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