durusmail: mems-talk: Etching of Si3N4
Etching of Si3N4
1999-11-08
Etching of Si3N4
Abmi
1999-11-08
Hello,

I was wondering about how to etch out Si3N4
chemically? I want to remove some part of
Si3N4 from a structure of Si3N4(100nm)/SiO2
(30nm). Thanking you

Abmi


Get your FREE Email at http://mailcity.lycos.com
Get your PERSONALIZED START PAGE at http://my.lycos.com


reply