Li,

Our company provides characterization services that would satisfy your
need. Please visit http://www.intersci.com/memspec for more details and
pricing.

Adolfo


>Does anyone know where I can find an instrument that can measure a 15
>micrometers deflection of a MEMS structure with a load in mili-Newton
>range? The sample is a doubly supported beam which is 200 micrometers long
>and 100 micrometers wide and 10 micrometers thick.
>Thanks in advance.
>
>
>
>----------------------------
>Li Li
>Dept. Mechanical Engineering
>University of Arkansas
>Fayetteville, AR 72701
>Tel: 501-521-9890
>Fax: 501-575-6982
>E-mail: ll0@engr.uark.edu
>----------------------------
>
>


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