Phil,

Use deep silicon RIE to etch a circular pattern, but don't complete the
etch.  That should work fine.

Thor

-----Original Message-----
From: Phil Rayner [mailto:p.j.rayner@cranfield.ac.uk]
Sent: Tuesday, January 12, 1999 8:06 AM
To: MEMS@ISI.EDU
Subject: Circular membranes


Hello,
I'm looking for a method to produce circular membranes etched
from Si. The membrane itself can be made of any material eg
Si3N4 or SiO2 or Si itself. Can anyone help?

Thanking you in advance

Phil Rayner