Does anyone know wet etching for Si3N4 with mask of photoresist or PMMA
or Polyimide?

Or some place which I can use a RF-plasma etching in D.C. metro area?


Thanks,


============================================
Kiyotaka Mori (Graduate Student)

Dept.of Materials and Nuclear Engineering,
BLDG.090,
University of Maryland at College Park,
College Park, MD 20742
Tel: 301-405-5229
Fax: 301-314-9467
E-mail: mori@eng.umd.edu