durusmail: mems-talk: Epson SU-8 photoresist
Epson SU-8 photoresist
Epson SU-8 photoresist
Narayanan, Chellappan (Chelly)
1999-01-18
Hi,

I am interested in etching about 7 microns of phosphosilicate glass
deposited on silicon substrate. I am running into undercut problems due to
erosion of the photoresist. Does anyone know if the SU-8 photoresist will
help solve my problem.

Thanks,
Chelly


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