durusmail: mems-talk: contact resistance
contact resistance
1999-01-22
contact resistance
Chris Foreman
1999-01-22
i have been electroplating various metals and would like any information
on evaluating contact resistance. i have seen some articles on test
structures for metal to semiconductor contact resistance measurement and
was wondering if anyone has tried to do a thorough evaluation of
electrical contact between the electroplated film and the base metal.
thanks.

--
J. Chris Foreman
University of Louisville
Lutz Hall - Room 428
Louisville, KY 40292 USA
502-852-1555 voice
502-852-1577 fax


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