durusmail: mems-talk: Re: interferometers
Re: interferometers
Re: interferometers
David_Winick@ncsu.edu
1999-02-14
> Does anyone know if there is a type of interferometer that would
> interface to an existing microscope? We have a porbe station we
> like, and it would be useful to measure z-direction vibrations at
> various points on the structures we look at.
>
> Thanks,
> --
>
> %%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%
>
> Dr. John Neumann
> Postdoctoral Researcher, ECE Dept.
> Micro-electro-mechanical Systems (MEMS)
> 1209 Hamerschlag Hall
> Carnegie Mellon University
> Pittsburgh, PA 15213-3890
>
> jneumann@ece.cmu.edu
> phone: (412) 268-4404
> FAX: (412) 268-2860
>

John,

Does the microscope fit standard objective lenses or is it a stereo-zoom
style unit?  If the former, you have several options (especially if it also
has a trinocular tube).  The latter case would be somewhat of a problem.

I have been using a metrology microscope for my work, which has the
advantage of being an infinity-focus microscope tube.  Such a tube, in
combination with a Mireau objective, is ideal for clear high-magnification
microinterferometry (up to 50x objective); but it consequently has a very
small working distance.  Also be aware that you will need lots of light
from your lamphouse if you intend to filter it for monochromatic (or bio-)
interferometry, especially if using a CCD camera for recording.

For lower magnification objectives, Nikon, Leica, etc., make Michelson-type
objectives with a beam-splitter and reference mirror inside.  Or you can
try just using an optical flat above your device to create a reference
wavefront.  I can give you info from Nikon.

There is a also company that makes fiber optic laser doppler measurement
systems that fit to a trinocular tube.  But if project funds are preventing
purchase of a new microscope, this is far more costly.  I have contact info
on my desk back at work; e-mail me if you want it.

Make sure your microscope is sturdy and resistant to vibration, etc., before
trying to adapt it for microinterferometry.  My system, for instance, has a
problem with drift in the focus unit, that was never before detectible.
Unfortunately, it and LabView have made my life a living hell recently,
trying to gather (position, not vibration) data.


 - dave.

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