The following discusses simulations of adding a parallel-plate or MOS
capacitor in series.  For stabilization; linearization method is then a
function of the device and application.


Joseph I. Seeger, Selden B. Crary.
"Stabilization of Electrostatically Actuated Mechanical Devices",
Transducers `97, IEEE, volume 2.  Pages 1133-1136.  Chicago.

SPIE Paper #: 4A2.11P



> Dear Colleagues
> starting my work on MEMS I would appreciate if anybody can send
> me some information about control of electrostatic driven actuators
> in the instable regime. Especially I am interested in control
> mechanisms to keep the actuator output linear at great deflection
> angles. Any information about latest breakthroughs would be highly
> appreciated. Thanks in advance

> Andreas

> ==================================
> Dr. Andreas Ehrlich
> Erwin Sick Engineering GmbH
> Bergener Ring 43
> D-01458 Ottendorf-Okrilla
> GERMANY
> Phone: (+49) 35205/524-42
> Fax:   (+49) 35205/524-22
> Email: ehrlicha@engineering.sick.de
> ===================================

>