durusmail: mems-talk: SiO2 Wet etch rate?
SiO2 Wet etch rate?
1998-09-08
SiO2 Wet etch rate?
park chang min
1998-09-08
Hello, mems.
I want to know  etch rate of SiO2 etch rate using etchant Buffered HF (
6:1).(BOE)
And I want to know that the etch rate of SiO2 using etchant KOH(20:80)
H2O, too.
Please let me know as soon as possible.
Sincerely yours.


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