durusmail: mems-talk: Pt/Ta electrodes
Pt/Ta electrodes
1999-01-28
Pt/Ta electrodes
Kavita Chandra
1999-01-28
Hi,
I am looking for some information on
the mechanical properties of Pt/Ta
electrodes: modulus, density, poisson's
ratio..etc.

Replies would be greatly appreciated!!

Thanks,
Kavita Chandra


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