Dear Colleagues,
I am doing my masters in Micromachining at Simon Fraser University in Canada.

I am trying to fabricate a force sensor using micromachining. My force sensor
is for use in endoscopic surgery where it has to be integrated inside the
gripper. Is using the piezoresistive effect the ideal method to fabricate a
force sensor in terms of fabrication complexity ? Also say if I make a Silicon
Dioxide cantilever with polysilicon piezoresistors how can I fix a tip on the
cantilever for transmitting the force to the cantilever ? I did a lot of
literature survey but could not find anything which describes how to bond a
medium ( like a needle tip ) on the cantilever for transmitting the force. I
would greatly appreciate any ideas from you folks on this. Also if anyone has a
better idea of making a force sensor using micromachining would they please
share it on this group ?

Thanks a lot for your time.

Hoping for a good brainstorm session soon.

Bye

Manish Mehta

email - mehta@cs.sfu.ca