Try Jeff Melzak at Case Western University. (jeff@mems4.eciv.cwru.edu). They grow thick poly on 4" wafers. Jon Bernstein At 04:34 PM 4/9/99 -0400, you wrote: >Hi! >Is there some place where I could get thick polysilicon deposited on >oxidized Si wafers? I am looking for ~10um thick layer. > >Thanks >Madan > > > Jonathan Bernstein MEMS Technology Center Draper Labs, MS 37 555 Technology Square Cambridge, MA 02139 USA jbernstein@draper.com Tel. (617) 258-2513 Fax (617) 258-4238