Dear MEMS researchers, I am working at the LAAS-CNRS in Toulouse (France) on the modeling, fabrication and characterization of a MEMS torsion mirror. I am currently studying the vibrational damping characteristics of the system. The main contributions to energy losses in MEMS are: - internal friction in the material - support loss - squeeze force - airflow force or viscous damping Internal friction and support loss seem to be negligible compared to the other dampings at atmospheric pressure. Many papers deal with the squeeze film damping. My problem is to clarify analytically the airflow force. I read the book the most mentionned in references in the studies of viscous damping: Fluid Mechanics, Landau and Lifchitz, Pergamon Press, 1959. Unfortunately, without convincing results. If anyone has any information on a such viscous damping (which is in fact the viscous damping of a rectangular plate in vibrational tilting motion) please contact me by email or at the address below. Thanks for your help. Franck LARNAUDIE Microstructures and Integrated Microsystems Group LAAS-CNRS 7, avenue du Colonel Roche 31077 Toulouse France Phone: 33-5-61-33-69-34 Fax: 33-5-61-33-62-08