Hi: Does anybody have experience to deposit polysilicon on 7740 glass as etching mask? or just have any experience of sputtering polysilicon? I found some papers telling about that, but some require high frequency, can we just do it in common machine by just changing current or pressure? ____________________________________________ Jerry Lee (Jia-Hong Lee) Insitute of Applied Mechanics, National Taiwan University Taipei, Taiwan, ROC e-mail: iamjhlee@email.com r6543023@gauss.iam.ntu.edu.tw "Try then error is better than no try"